Bubbler for constant vapor delivery of a solid chemical

Journal of Crystal Growth

Volumn 298, Issue SPEC. ISS, 2007, Pages 168-171

  Andre, C L ^a   El Zein, N ^a   Tran, N ^a  

^a Akzo Nobel LLC   (United States)

Author keywords

A1. Heat and mass transfer; A3. Metalorganic chemical vapor deposition; B2. Semiconducting indium compounds

Indexed keywords

EPITAXIAL GROWTH; HEAT TRANSFER; MASS TRANSFER; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OPTOELECTRONIC DEVICES; THROUGHPUT;

ELECTRONIC DEVICES; GAS FLOW RATES; MOLAR FLOW RATES; TELECOMMUNICATION LASERS; TRIMETHYLINDIUM (TMIN);

SEMICONDUCTING INDIUM COMPOUNDS;

EID: 33846443648     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2006.10.018     Document Type: Article

References (5)

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4. US Patent No. 4 734 (1987) 999.
5. International Patent No. WO 2005/113857 A1 (2005).