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Volumn 204, Issue 1, 2007, Pages 99-105

Formation of precipitates in Mn doped ZnO layers deposited by magnetron sputtering

a CNRS (France)

Author keywords

[No Author keywords available]

Indexed keywords

OPTIMAL TEMPERATURE; PRECIPITATES; QUALITY OF LAYERS;

DEPOSITION; DOPING (ADDITIVES); MAGNETRON SPUTTERING; MANGANESE; PRECIPITATION (CHEMICAL); SAPPHIRE;

ZINC OXIDE;

EID: 33846427341 PISSN: 18626300 EISSN: 18626319 Source Type: Journal
DOI: 10.1002/pssa.200673011 Document Type: Conference Paper

Times cited : (4)

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