LZY: A self-calibration approach in competition to the LRM method for on-wafer measurements

45th ARFTG Conference Digest - Spring 1995

Volumn , Issue , 1995, Pages 129-136

  Heuermann, Holger ^a,b  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b Rosenberger Hochfrequenztechnik   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION PROCESS; CALIBRATION STANDARD; GROUND CONNECTIONS; IMPEDANCE STANDARDS; ON-WAFER MEASUREMENTS; PROPAGATION CONSTANT; SELF-CALIBRATION APPROACH; SELF-CALIBRATION PROCEDURES;

CALIBRATION;

EID: 33846403091     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ARFTG.1995.327116     Document Type: Conference Paper

References (6)

1. HEWLETT PACKARD, On-Wafer Measurements Using the HP 8510 Network Analyzer and Cascade Microtech Wafer Probes, Product Note 8510-6, May 1986
2. ENGEN, G. F., HOER, C. A., Thru-Reflect-Line: An Improved Technique for Calibrating the Dual Six Port Automatic Network Analyzer, IEEE Trans. Microw. Theo. Techn., MTT-27, Dec. 1979, pp. 987-993
3. EUL, H. J., SCHIEK, B., A Generalized Theory and New Calibration Procedures for Network Analyzer Self-Calibration, IEEE Trans. Microw. Theo. Techn., MTT-39, Mar. 1991, pp. 724-731
4. DAVIDSON, A., STRID, E., JONES, K., Achieving Greater On-Wafer S-Parameter Accuracy with the LRM Calibration Technique, HP-/Cascade-Microtech-Article
5. HEUERMANN, H., SCHIEK, B., Error Corrected Impedance Measurements with a Network Analyzer, IEEE Trans. Instrum. Meas., Apr. 1995
6. HEUERMANN, H., SCHIEK, B., Results of Network Analyzer Measurements with Leakage Errors Corrected with the TMS-15-Term Procedure, Proceedings of the IEEE MTT-S Int. Microw. Symp., San Diego, 1994, pp. 1361-1364