Wear-corrosion properties of diamond conditioners in CMP slurry

Wear

Volumn 262, Issue 5-6, 2007, Pages 693-698

  Tan, A H ^a   Cheng, Y C ^a  

^a CHING YUN UNIVERSITY   (Taiwan)

Author keywords

CMP; Corrosion; Diamond conditioner; Wear

Indexed keywords

CORROSION; CORROSION RESISTANCE; ELECTROPLATING; FRICTION; SLURRIES; WEAR OF MATERIALS;

DIAMOND CONDITIONER; DIAMOND CONDITIONERS; WEAR LOSS; WEAR-CORROSION TESTS;

DIAMOND LIKE CARBON FILMS;

CORROSION; CORROSION RESISTANCE; DIAMOND LIKE CARBON FILMS; ELECTROPLATING; FRICTION; SLURRIES; WEAR OF MATERIALS;

EID: 33846279774     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.wear.2006.08.001     Document Type: Article

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