Rapid prototyping tools and methods for all-Topas® cyclic olefin copolymer fluidic microsystems

Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science

Volumn 220, Issue 11, 2006, Pages 1625-1632

  Bundgaard, F ^a   Perozziello, G ^a   Geschke, O ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

Bonding; Micromilling; Polymers; Spin coating

Indexed keywords

CHEMICAL RESISTANCE; MACHINABILITY; MILLING (MACHINING); OPTICAL PROPERTIES; SPIN COATING; WATER ABSORPTION;

LASER BONDING; MICROMILLING; RAPID PROTOTYPING TOOLS; THERMAL BONDING;

FLUIDICS;

CHEMICAL RESISTANCE; FLUIDICS; MACHINABILITY; MILLING (MACHINING); OPTICAL PROPERTIES; SPIN COATING; WATER ABSORPTION;

EID: 33846271060     PISSN: 09544062     EISSN: None     Source Type: Journal    
DOI: 10.1243/09544062JMES295     Document Type: Article

References (13)

1. Becker, H. and Locascio, L. E. Polymer microfluidic devices: a review. Talanta, 2002, 56, 267-287.
2. Velten, T., Ruf, H. H., Barrow, D., Aspragathos, N., Lazarou, P., Jung, E., Malek, C. K., Richter, M., Kruckow, J., and Wackerle, M. Packaging of bio-MEMS: strategies, technologies and applications. IEEE Trans. Adv. Packaging, 2005, 28, 533-546.
3. Topas® is a registered trademark of Topas Advanced Polymers GmbH, Frankfurt, Höechst, Germany, available from www.topas.com.
4. 2-laser micromachining and back-end processing for rapid production of PMMA-based microfluidic systems. Lab-on-a-Chip, 2002, 2, 242-246.
5. 2 laser microfabrication of an integrated polymer microfluidic manifold for the determination of phosphorus. Lab-on-a-Chip, 2003, 3, 221-223.
6. Jensen, M. F., McCormack, J. E., Helbo, B., Christensen, L. H., Christensen, T. R., and Geschke, O. Rapid prototyping of polymer microsystems via excimer laser ablation on polymeric moulds. Lab-on-a-Chip, 2004, 4, 391-395.
7. Bundgaard, F., Nielsen, T., Nilsson, D., Shi, P., Perozziello, G., Kristensen, A., and Geschke, O. Cyclic olefin copolymer (COC/Topas®) - an exceptional material for exceptional lab-on-a-chip systems. Proceedings of the μTAS 2004, Malmö, Sweden, pp. 372-374.
8. Clearweld® is a registerd trademark of Gentex Corporation, Simpson, Pennesylvania, USA, available from www.clearweld.com
9. Ussing, T., Petersen, L. V., Helbo, B., and Højslet, L. Micro laser welding of polymer microstructures using low power laser diodes. In Proceedings of the 4M2005 Conference on Multi-material micro manufacture, Karlsruhe, Germany, pp. 291-293.
10. FluimediX, Laser welding device under development by FluimediX ApS, Høje Taastrup, Denmark, available from www.fluimedix.com
11. Nielsen, T., Nilsson, D., Bundgaard, F., Shi, P., Szabo, P., Geschke, O., and Kristensen, A. Nanoimprint lithography in the cyclic olefin copolymer Topas®, a highly UV-transparent and chemically resistant thermopast. J. Vac. Sci. Technol. B, 2004, 22, 1770-1775.
12. Kim, D. S., Lee, H. S., Kwon, T. H., and Ahn, C. H. A collapse-free thermal bonding technique for plastic microfluidic systems with large area microchambers. Proceedings of the μTAS 2005, Boston, MA, USA, pp. 684-686.
13. Brenner, T., Müller, C., Reinicke, H., Zengerle, R., and Ducrée, J. Fabrication chain for prototyping of microfluidic chips in polymers. In Proceedings of the 4M2005 Conference on Multi-material micro manufacture, Karlsruhe, Germany, pp. 111-114.