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Volumn 53, Issue 6, 2006, Pages 3621-3628

Atomic-scale mechanisms for low-NIEL dopant-type dependent damage in Si

Author keywords

Density functional theory; Displacement damage; Electron traps; Frenkel pairs

Indexed keywords

DISPLACEMENT DAMAGE; FRENKEL PAIRS; NON-IONIZING ENERGY LOSS (NIEL);

EID: 33846267995     PISSN: 00189499     EISSN: None     Source Type: Journal    
DOI: 10.1109/TNS.2006.885383     Document Type: Conference Paper
Times cited : (15)

References (33)
  • 1
    • 0038382314 scopus 로고    scopus 로고
    • Review of displacement damage effects in Silicon devices
    • Jun
    • J. R. Srour, C. J. Marshall, and P. W. Marshall, "Review of displacement damage effects in Silicon devices," IEEE Trans. Nucl. Sci., vol. 50, no. 3, pp. 653-670, Jun. 2003.
    • (2003) IEEE Trans. Nucl. Sci , vol.50 , Issue.3 , pp. 653-670
    • Srour, J.R.1    Marshall, C.J.2    Marshall, P.W.3
  • 4
    • 0343657593 scopus 로고
    • Radiation defect introduction rates in n- and p-type Silicon in the vicinity of the radiation damage threshold
    • H. Flicker, J. J. Loferski, and J. Scott-Monck, "Radiation defect introduction rates in n- and p-type Silicon in the vicinity of the radiation damage threshold," Phys. Rev., vol. 128, pp. 2557-2563, 1962.
    • (1962) Phys. Rev , vol.128 , pp. 2557-2563
    • Flicker, H.1    Loferski, J.J.2    Scott-Monck, J.3
  • 6
    • 0027844647 scopus 로고
    • Damage correlations in semiconductors exposed to gamma-radiation, electron-radiation and proton-radiation
    • Dec
    • G. P. Summers, E. A. Burke, P. Shapiro, S. R. Messenger, and R. J. Walters, "Damage correlations in semiconductors exposed to gamma-radiation, electron-radiation and proton-radiation," IEEE Trans. Nucl. Sci., vol. 40, no. 6, pp. 1372-1379, Dec. 1993.
    • (1993) IEEE Trans. Nucl. Sci , vol.40 , Issue.6 , pp. 1372-1379
    • Summers, G.P.1    Burke, E.A.2    Shapiro, P.3    Messenger, S.R.4    Walters, R.J.5
  • 7
    • 33846288638 scopus 로고    scopus 로고
    • Defect levels in Silicon
    • R. Hull, Ed. London, U.K, Inst. Elect. Eng
    • G. D. Watkins, "Defect levels in Silicon," in Properties of Crystalline Silicon, R. Hull, Ed. London, U.K.: Inst. Elect. Eng., 1997, pp. 641-652.
    • (1997) Properties of Crystalline Silicon , pp. 641-652
    • Watkins, G.D.1
  • 8
    • 5244356706 scopus 로고
    • Mechanisms of dopant impurity diffusion in Silicon
    • C. S. Nichols, C. G. Vandewalle, and S. T. Pantelides, "Mechanisms of dopant impurity diffusion in Silicon," Phys. Rev. B, vol. 40, pp. 5484-5496, 1989.
    • (1989) Phys. Rev. B , vol.40 , pp. 5484-5496
    • Nichols, C.S.1    Vandewalle, C.G.2    Pantelides, S.T.3
  • 9
    • 0016025375 scopus 로고    scopus 로고
    • K. S. Asimov, S. M. Gorodatskii, G. M. Grigor'eve, L. R. Kreinin, and A. P. Landsman, Influence of disordered regions on the recombination in proton-irradiated \ p-type Silicon, Sov. Phys. Semicond., 7, pp. 1021-1025, 1974.
    • K. S. Asimov, S. M. Gorodatskii, G. M. Grigor'eve, L. R. Kreinin, and A. P. Landsman, "Influence of disordered regions on the recombination in proton-irradiated \ p-type Silicon," Sov. Phys. Semicond., vol. 7, pp. 1021-1025, 1974.
  • 10
    • 0008622683 scopus 로고
    • Electron energy dependence of relative damage coefficients of Silicon solar cells for space use
    • Kyoto, Japan
    • T. Noguchi and M. Uesugi, "Electron energy dependence of relative damage coefficients of Silicon solar cells for space use," in Proc. Int. PVSEC-5, Kyoto, Japan, 1990, p. 557.
    • (1990) Proc. Int. PVSEC-5 , pp. 557
    • Noguchi, T.1    Uesugi, M.2
  • 11
    • 33846323020 scopus 로고    scopus 로고
    • J. R. Carter and R. G. Downing, Charged particle radiation damage in semiconductors, XI: Effect of low energy protons and high energy electrons on Silicon, Interim Technical Final Rep.: TRW Space Technol. Lab., 1965.
    • J. R. Carter and R. G. Downing, "Charged particle radiation damage in semiconductors, XI: Effect of low energy protons and high energy electrons on Silicon," Interim Technical Final Rep.: TRW Space Technol. Lab., 1965.
  • 14
    • 0030190741 scopus 로고    scopus 로고
    • Efficiency of ab-initio total energy calculations for metals and semiconductors using a plane-wave basis set
    • G. Kresse and J. Furthmuller, "Efficiency of ab-initio total energy calculations for metals and semiconductors using a plane-wave basis set," Comput. Mater. Sci., vol. 6, pp. 15-50, 1996.
    • (1996) Comput. Mater. Sci , vol.6 , pp. 15-50
    • Kresse, G.1    Furthmuller, J.2
  • 15
    • 2442537377 scopus 로고    scopus 로고
    • Efficient iterative schemes for ab initio total-energy calculations using a plane-wave basis set
    • G. Kresse and J. Furthmuller, "Efficient iterative schemes for ab initio total-energy calculations using a plane-wave basis set," Phys. Rev. B, vol. 54, pp. 11169-11186, 1996.
    • (1996) Phys. Rev. B , vol.54 , pp. 11169-11186
    • Kresse, G.1    Furthmuller, J.2
  • 16
    • 20544463457 scopus 로고
    • Soft self-consistent pseudopotentials in a generalized eigenvalue formalism
    • D. Vanderbilt, "Soft self-consistent pseudopotentials in a generalized eigenvalue formalism," Phys. Rev. B, vol. 41, pp. 7892-7895, 1990.
    • (1990) Phys. Rev. B , vol.41 , pp. 7892-7895
    • Vanderbilt, D.1
  • 17
    • 0028763270 scopus 로고
    • Norm-conserving and ultrasoft pseudopotentials for first-row and transition-elements
    • G. Kresse and J. Hafner, "Norm-conserving and ultrasoft pseudopotentials for first-row and transition-elements," J. Phys. Cond. Matter, vol. 6, pp. 8245-8257, 1994.
    • (1994) J. Phys. Cond. Matter , vol.6 , pp. 8245-8257
    • Kresse, G.1    Hafner, J.2
  • 18
    • 33744691386 scopus 로고
    • Ground-state of the electron-gas by a stochastic method
    • D. M. Ceperley and B. J. Alder, "Ground-state of the electron-gas by a stochastic method," Phys. Rev. Lett., vol. 45, pp. 566-569, 1980.
    • (1980) Phys. Rev. Lett , vol.45 , pp. 566-569
    • Ceperley, D.M.1    Alder, B.J.2
  • 19
    • 26144450583 scopus 로고
    • Self-interaction correction to density-functional approximations for many-electron systems
    • J. P. Perdew and A. Zunger, "Self-interaction correction to density-functional approximations for many-electron systems," Phys. Rev. B, vol. 23, pp. 5048-5079, 1981.
    • (1981) Phys. Rev. B , vol.23 , pp. 5048-5079
    • Perdew, J.P.1    Zunger, A.2
  • 20
    • 1842816907 scopus 로고
    • Special points for brillouin-zone integrations
    • H. J. Monkhorst and J. D. Pack, "Special points for brillouin-zone integrations," Phys. Rev. B, vol. 13, pp. 5188-5192, 1976.
    • (1976) Phys. Rev. B , vol.13 , pp. 5188-5192
    • Monkhorst, H.J.1    Pack, J.D.2
  • 21
    • 0037441243 scopus 로고    scopus 로고
    • Improving the convergence of defect calculations in supercells: An ab initio study of the neutral Silicon vacancy
    • art. no. 075204
    • M. I. J. Probert and M. C. Payne, "Improving the convergence of defect calculations in supercells: An ab initio study of the neutral Silicon vacancy," Phys. Rev. B, vol. 67, 2003, art. no. 075204.
    • (2003) Phys. Rev. B , vol.67
    • Probert, M.I.J.1    Payne, M.C.2
  • 22
    • 4243269463 scopus 로고
    • Silicon vacancy-possible anderson negative-u system
    • G. A. Baraff, E. O. Kane, and M. Schluter, "Silicon vacancy-possible anderson negative-u system," Phys. Rev. Lett., vol. 43, pp. 956-959, 1979.
    • (1979) Phys. Rev. Lett , vol.43 , pp. 956-959
    • Baraff, G.A.1    Kane, E.O.2    Schluter, M.3
  • 23
    • 24544431578 scopus 로고
    • Electronic- structure of the jahn-teller distorted vacancy in Silicon
    • N. O. Lipari, J. Bernholc, and S. T. Pantelides, "Electronic- structure of the jahn-teller distorted vacancy in Silicon," Phys. Rev. Lett., vol. 43, pp. 1354-1357, 1979.
    • (1979) Phys. Rev. Lett , vol.43 , pp. 1354-1357
    • Lipari, N.O.1    Bernholc, J.2    Pantelides, S.T.3
  • 24
    • 27844464859 scopus 로고    scopus 로고
    • Ab initio calculations of the interaction between native point defects in Silicon
    • G. Hobler and G. Kresse, "Ab initio calculations of the interaction between native point defects in Silicon," Mater. Sci. Eng. B, vol. 124, pp. 368-371, 2005.
    • (2005) Mater. Sci. Eng. B , vol.124 , pp. 368-371
    • Hobler, G.1    Kresse, G.2
  • 27
    • 0038715654 scopus 로고    scopus 로고
    • B. L. Gregory, Injection-stimulated vacancy reordering in p-type Silicon at 76 K, J. Appl. Phys., 36, pp. 3765-&, 1965.
    • B. L. Gregory, "Injection-stimulated vacancy reordering in p-type Silicon at 76 K," J. Appl. Phys., vol. 36, pp. 3765-&, 1965.
  • 28
    • 0041176250 scopus 로고    scopus 로고
    • Bound vacancy interstitial pairs in irradiated Silicon
    • H. Zillgen and P. Ehrhart, "Bound vacancy interstitial pairs in irradiated Silicon," Nucl. Instrum. Meth. Phys. Res. B, vol. 127, pp. 27-31, 1997.
    • (1997) Nucl. Instrum. Meth. Phys. Res. B , vol.127 , pp. 27-31
    • Zillgen, H.1    Ehrhart, P.2
  • 29
    • 0031384438 scopus 로고    scopus 로고
    • Vacancies and interstitial atoms in irradiated Silicon
    • P. Ehrhart and H. Zillgen, T. D. de la Rubia, S. Coffa, P. A. Stolk, and C. S. Rafferty, Eds, San Fransisco, CA: Materials Research Soc
    • P. Ehrhart and H. Zillgen, , T. D. de la Rubia, S. Coffa, P. A. Stolk, and C. S. Rafferty, Eds., "Vacancies and interstitial atoms in irradiated Silicon," in Defects and Diffusion in Silicon Processing. San Fransisco, CA: Materials Research Soc., 1997, vol. 469, pp. 175-186.
    • (1997) Defects and Diffusion in Silicon Processing , vol.469 , pp. 175-186
  • 30
    • 0001499388 scopus 로고    scopus 로고
    • Lifetime in proton irradiated Silicon
    • A. Hallen, N. Keskitalo, F. Masszi, and V. Nagl, "Lifetime in proton irradiated Silicon," J. Appl. Phys., vol. 79, pp. 3906-3914, 1996.
    • (1996) J. Appl. Phys , vol.79 , pp. 3906-3914
    • Hallen, A.1    Keskitalo, N.2    Masszi, F.3    Nagl, V.4
  • 31
    • 0034451543 scopus 로고    scopus 로고
    • Universal damage factor for radiation-induced dark current in Silicon devices
    • Dec
    • J. R. Srour and D. H. Lo, "Universal damage factor for radiation-induced dark current in Silicon devices," IEEE Trans. Nucl. Sci., vol. 47, no. 6, pp. 2451-2459, Dec. 2000.
    • (2000) IEEE Trans. Nucl. Sci , vol.47 , Issue.6 , pp. 2451-2459
    • Srour, J.R.1    Lo, D.H.2
  • 32
    • 0036957349 scopus 로고    scopus 로고
    • Consistency of bulk damage factor and NIEL for electrons, protons, and heavy ions in SiCCDs
    • Dec
    • S. Kuboyama, H. Shindou, T. Hirao, and S. Matsuda, "Consistency of bulk damage factor and NIEL for electrons, protons, and heavy ions in SiCCDs," IEEE Trans. Nucl. Sci., vol. 49, no. 6, pp. 2684-2689, Dec. 2002.
    • (2002) IEEE Trans. Nucl. Sci , vol.49 , Issue.6 , pp. 2684-2689
    • Kuboyama, S.1    Shindou, H.2    Hirao, T.3    Matsuda, S.4
  • 33
    • 33846298000 scopus 로고    scopus 로고
    • A framework for understanding displacement damage mechanisms in irradiated Silicon devices
    • to be published
    • J. R. Srour and J. W. Palko, "A framework for understanding displacement damage mechanisms in irradiated Silicon devices," IEEE Trans. Nucl. Sci., to be published.
    • IEEE Trans. Nucl. Sci
    • Srour, J.R.1    Palko, J.W.2


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