MEMS acoustic sensor using PMN-PT single-crystal diaphragm

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6374, Issue , 2006, Pages

  Lee, Sung Q ^a   Kim, Hye Jin ^a   Park, Kang Ho ^a   Hong, Yong K ^b   Moon, Kee S ^b  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

^b SAN DIEGO STATE UNIVERSITY   (United States)

Author keywords

Acoustic sensor; Dry etching; MEMS; Microphone; PMN PT

Indexed keywords

DIAPHRAGMS; DRY ETCHING; ELECTRODES; MICROELECTROMECHANICAL DEVICES; MICROPHONES; SILICON WAFERS; SINGLE CRYSTALS;

ACOUSTIC SENSORS; PIEZOELECTRIC COEFFICIENTS;

MICROSENSORS;

EID: 33846223430     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.686007     Document Type: Conference Paper

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