Surface roughness parameters measurements by Digital Holographic Mcroscopy (DHM)

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6280 I, Issue , 2006, Pages

  Montfort, Frédéric ^a   Emery, Yves ^a   Solanas, Eduardo ^a   Cuche, Etienne ^a   Aspert, Nicolas ^a   Marquet, Pierre ^a   Joris, Claude ^a   Kühn, Jonas ^b   Depeursing, Christian ^b  

^a Lyncee Tec SA   (Switzerland)

^b EPFL   (Switzerland)

Author keywords

3D optical topography; Digital holography; Roughness measurements; Surface measurements

Indexed keywords

IMAGE ANALYSIS; MEASUREMENT THEORY; PARAMETER ESTIMATION; PHASE MEASUREMENT; SURFACE ROUGHNESS; THREE DIMENSIONAL COMPUTER GRAPHICS;

3D OPTICAL TOPOGRAPHY; DIGITAL HOLOGRAPHY; ROUGHNESS MEASUREMENTS; SURFACE MEASUREMENTS;

DIGITAL INSTRUMENTS;

EID: 33846137982     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.716113     Document Type: Conference Paper

References (3)

1. Denis Gabor, "A new microscopic principle", Nature, 1948.
2. Etienne Cuche, Pierre Marquet, and Christian Depeursinge "Simultaneous amplitude-contrast and quantitative phase-contrast microscopy by numerical reconstruction of Fresnel off-axis holograms", Appl. Opt. 38, pp. 6994 - 7001, (1999)
3. Tristan Colomb, Etienne Cuche, Florian Charrière, Jonas Kühn, Nicolas Aspert, Frédéric Montfort, Pierre Marquet, and Christian Depeursinge, "Automatic procedure for aberration compensation in digital holographic microscopy and applications to specimen shape compensation," Appl. Opt. 45, 851-863 (2006).