Resonant capacitive MEMS acoustic emission transducers

Smart Materials and Structures

Volumn 15, Issue 6, 2006, Pages 1863-1871

  Ozevin, D ^a,c   Greve, D W ^b   Oppenheim, I J ^b   Pessiki, S P ^c  

^a Physical Acoustics Corporation   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

^c Lehigh University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC EMISSION TESTING; ATMOSPHERIC PRESSURE; CAPACITANCE; DAMPING; MICROELECTROMECHANICAL DEVICES; POLYSILICON;

ACOUSTIC EMISSION (AE) DETECTORS; GEOMETRIC PROPORTIONS; TRANSDUCER RESPONSES;

ACOUSTIC TRANSDUCERS;

EID: 33846086912     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/15/6/041     Document Type: Article

References (12)

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