Effect of pre-metallization processing and annealing on Ni/Au Schottky contacts in AlGaN/GaN heterostructures

Wuli Xuebao/Acta Physica Sinica

Volumn 55, Issue 11, 2006, Pages 6085-6089

  Wang, Chong ^a   Feng, Qian ^a   Hao, Yue ^a   Wan, Hui ^a  

^a XIDIAN UNIVERSITY   (China)

Author keywords

AlGaN GaN; Annealing; Schottky contact; Surface cleaning

Indexed keywords

EID: 33846065467     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)