Praseodymium based high-k dielectrics grown on Si and SiC substrates

Materials Science in Semiconductor Processing

Volumn 9, Issue 6, 2006, Pages 1073-1078

  Lo Nigro, Raffaella ^a   Toro, Roberta G ^b   Malandrino, Graziella ^b   Fragalà, Ignazio L ^b   Raineri, Vito ^a   Fiorenza, Patrick ^a  

^a CNR   (Italy)

^b UNIVERSITY OF CATANIA   (Italy)

Author keywords

Dielectric; MOCVD; Praseodymium oxides; Thin films

Indexed keywords

DIELECTRIC FILMS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; POLYCRYSTALLINE MATERIALS; SCANNING ELECTRON MICROSCOPY; SILICON COMPOUNDS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

DIELECTRIC PRASEODYMIUM FILMS; HIGH-K DIELECTRICS; MORPHOLOGICAL CHARACTERIZATION; PRASEODYMIUM OXIDES;

DIELECTRIC MATERIALS;

EID: 33846058355     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mssp.2006.10.026     Document Type: Article

References (17)

1. International technology roadmap for semiconductors, Semiconductors Industry Association, San Jose, California; 2002. http://public.itrs.net
2. Muller D.A., Sorsch T., Moccio S., Baumann F.H., and Timp G. Nature 758 (1999) 399
3. Packan P. Science 2079 (1999) 285
4. Johnson C.M., Wright N.G., Uren M.J., Hilton K.P., Rahimo M., Hinchley D.A., et al. IEEE Proc Circuits Devices Syst 101 (2001) 148
5. Muller S.G., Glass R.C., Hobgood H.M., Tsvetkov V.F., Brady M., Henshall D., et al. Mater Sci Eng B 327 (2001) 80
6. Hubbard K.J., and Schlom D.G. J Mater Res 2757 (1996) 11
7. Osten H.J., Liu J.P., Gaworzewski P., Bugiel E., and Zaumseil P. IEDM Tech Dig 653 (2000)
8. Adachi G., and Imanaka N. Chem Rev 1479 (1998) 98
9. Osten H.J., Liu J.P., and Mussig H.J. Appl Phys Lett 297 (2002) 80
10. Morss L.R. Chem Rev 827 (1976) 7
11. Lo Nigro R., Toro R., Malandrino G., Raineri V., and Fragalà I.L. Adv Mater 1071 (2003) 15
12. Lo Nigro R., Raineri V., Bongiorno C., Toro R., Malandrino G., and Fragalà I.L. Appl Phys Lett 129 (2003) 83
13. Lo Nigro R., Toro R.G., Malandrino G., Condorelli G.G., Raineri V., and Fragalà I.L. Adv Funct Mater 838 (2005) 15
14. Lo Nigro R., Malandrino G., Toro R.G., and Fragalà I.L. Chem Vap Dep 109 (2006) 12
15. Aspinell H.C., Gaskell J., Williams P.A., Jones A.C., Chalker P.R., Marshall P.A., et al. Chem Vap Dep 235 (2003) 9
16. Aspinell H.C., Gaskell J., Williams P.A., Jones A.C., Chalker P.R., Marshall P.A., et al. Chem Vap Dep 83 (2004) 10
17. Lo Nigro R., Toro R., Malandrino G., and Fragalà I.L. J Electrochem Soc F206 (2004) 151