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-1; the film has been exchanged when the concentration arising from a single defect is c/2 at D/2. Under these conditions, the separation between defects is ∼146 nm × √r/nm, where r is the radius of the defect. For r = 1 nm, the defects would need to be spaced by about 150 nm.
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-1; the film has been exchanged when the concentration arising from a single defect is c/2 at D/2. Under these conditions, the separation between defects is ∼146 nm × √r/nm, where r is the radius of the defect. For r = 1 nm, the defects would need to be spaced by about 150 nm.
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