A nodal analysis method for an electrically actuated microbeam

Chinese Journal of Sensors and Actuators

Volumn 19, Issue 5, 2006, Pages 1366-1367

  Li, Min ^a   Huang, Qing An ^a   Li, Wei Hua ^a  

^a Southeast University   (China)

Author keywords

Electrically actuated microbeam; Equivalent circuit; MEMS; Nodal analysis method; Weighted residual method

Indexed keywords

EID: 33846001977     PISSN: 10041699     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)

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