Monitoring acoustic emission in the ablation of photoresist coatings from a metallic substrate during excimer laser micromachining

Lasers in Engineering

Volumn 16, Issue 3-4, 2006, Pages 181-193

  Badgujar, B P ^a   Kumar, Santosh ^a   Viswanadham, C S ^a   Goswami, G L ^a  

^a BHABHA ATOMIC RESEARCH CENTRE   (India)

Author keywords

Acoustic emission; Excimer laser; Laser ablation; Laser micromachining; Photoresist

Indexed keywords

ACOUSTIC EMISSIONS; ACOUSTIC SIGNAL PROCESSING; COATINGS; EXCIMER LASERS; LASER BEAMS; MICROMACHINING; PHOTORESISTORS;

FREQUENCY SPECTRUM ANALYSIS; LASER MICROMACHINING; PHOTORESIST COATINGS; ROOT MEAN SQUARE (RMS);

LASER ABLATION;

EID: 33845928750     PISSN: 08981507     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)

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