Measurement of thermal conductivity of ultra-thin single crystal silicon film using symmetric structure

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 27, Issue 11, 2006, Pages 1961-1965

  Zhang, Hao ^a   Lu, Zhichao ^a   Tian, Lilin ^a   Tan, Zhimin ^a   Liu, Litian ^a   Li, Zhijian ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Steady state joule heating; Thermal conductivity; Ultra thin single crystal layer

Indexed keywords

HEATING; SILICON; SINGLE CRYSTALS; THERMAL CONDUCTIVITY;

PHONON BOUNDARY SCATTERING; STEADY STATE JOULE HEATING; ULTRATHIN SINGLE CRYSTAL LAYER;

ULTRATHIN FILMS;

EID: 33845778014     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)

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