Reduced loss through improved fabrication for single air interface bends in polymer waveguides

Optics Express

Volumn 14, Issue 26, 2006, Pages 12803-12813

  Lin, Yongbin ^a   Cardenas, Jaime ^a   Kim, Seunghyun ^b   Nordin, Gregory P ^b  

^a UNIVERSITY OF ALABAMA IN HUNTSVILLE   (United States)

^b Department of Electrical and Computer Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC LOSSES; ELECTRON BEAM LITHOGRAPHY; INTERFACES (MATERIALS); LIGHT POLARIZATION; POLYMERS; SCANNING ELECTRON MICROSCOPY;

MICROFABRICATION TOOLSET; PERFLUOROCYCLOBUTYL (PFCB); POSITION ACCURACY;

WAVEGUIDES;

EID: 33845750570     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.14.012803     Document Type: Article

References (6)

1. L. Li, G. P. Nordin, J. M. English, and J. Jiang, "Small-area bends and beamsplitters for low-index-contrast waveguides," Opt. Express 11, 282-290 (2003).
2. J. Cardenas, S. Kim, and G. P. Nordin, "Compact low loss single air interface bends in polymer waveguides," Opt. Express 12, 5314-5324 (2004).
3. D. W. Smith, Jr., S. Chen, S. Kumar, J. Ballato, H. Shah, C. Topping, and S. H. Foulger, "Perfluorocyclobutyl Copolymers for Microphotonics," S. Adv. Mater. 14, pp. 1585-1589 (2002).
4. D. W. Smith, Jr., A. B. Hoeglund, H. V. Shah, M. J. Radler, C. A. Langhoff, "Perfluorocyclobutane Polymers for Optical Fibers and Dielectric Waveguides," in Optical Polymers, J. Harmon, ed., ACS Symp. Ser. 795, Chap. 4, pp. 49-62 (2001).
5. J. Ballato, D. W. Smith Jr, and S. H. Foulger, "Optical Properties of Perfluorocyclobutyl (PFCB) Polymers," J. Opt. Soc. Am. B 20, 1838-1843 (2003).
6. M. J. Madou, "Lithography," in Fundamentals of Microfabrication: The Science of Miniaturization, 2nd ed. (CRC Press, Fla., 2002) pp. 28-29.