Simulations and analysis of a piezoelectric micropump

Ultrasonics

Volumn 44, Issue SUPPL., 2006, Pages

  Wang, Baowei ^a   Chu, Xiangcheng ^a   Li, Enzhu ^a   Li, Longtu ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

FEA; Optimization; Piezoelectric; Pump; Simulation

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROACTUATORS; TRANSDUCERS;

MICROFABRICATION TECHNOLOGIES; MICROPUMPS; PIEZOELECTRIC ACTUATORS;

PIEZOELECTRIC DEVICES;

EID: 33845713196     PISSN: 0041624X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultras.2006.05.018     Document Type: Article

References (5)

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3. Li E., Chu X., Li L., and Gui Z. Study on the diffuser/nozzle-based valveless piezoelectric pump. Rare Metal Mater. Eng. 34 suppl. 1 (2005) 1033
4. Manual of Polytec Scanning Vibrometer, Polytec GmbH Germany.
5. Anders Olsson, Goran Stemme, Erik Stemme, Simulation studies of diffuser and nozzle elements for valveless micropumps, in: Int. Conf. Solid-State Sens. Actuators, Chicago, June 16-19, 1997.