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Volumn 2006, Issue , 2006, Pages 358-363
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Modeling and analysis of a micro variable capacitance electromechanical energy converter
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Author keywords
Energy conversion; Finite element analysis; Micro electromechanical systems; Variable capacitance micromotor
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Indexed keywords
CAPACITANCE;
COMPUTER SIMULATION;
FINITE ELEMENT METHOD;
MATHEMATICAL MODELS;
MICROELECTROMECHANICAL DEVICES;
MICROMACHINING;
AIR GAP;
ELECTROSTATIC FORCES;
SIMULINK;
VARIABLE CAPACITANCE MICROMOTOR;
ENERGY CONVERSION;
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EID: 33845587235
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/SPEEDAM.2006.1649798 Document Type: Conference Paper |
Times cited : (3)
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References (5)
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