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Volumn 126, Issue 12, 2006, Pages

Magnetic levitated 2D fast drive

Author keywords

2D drive; Electromagnetic suspension

Indexed keywords

ACCELERATION; ELECTRIC WIRE; OPTICAL RESOLVING POWER; PRODUCT DESIGN;

EID: 33845536245     PISSN: 09136339     EISSN: 13488163     Source Type: Journal    
DOI: 10.1541/ieejias.126.1678     Document Type: Article
Times cited : (5)

References (5)
  • 2
    • 1842579123 scopus 로고    scopus 로고
    • Electro-dynamic planar motor
    • J.C. Compter: "Electro-dynamic planar motor", Precision Engineering, Vol.28, No.2004, pp.171-180 (2004)
    • (2004) Precision Engineering , vol.28 , Issue.2004 , pp. 171-180
    • Compter, J.C.1
  • 3
    • 0030720423 scopus 로고    scopus 로고
    • Linear motor-levitated stage for photolithograpy
    • W.J. Kim, D.L. Trumpert, and J.H. Lang: "Linear Motor-Levitated Stage for Photolithograpy", Annals of the CIRP, Vol.46, pp.447-450 (1997)
    • (1997) Annals of the CIRP , vol.46 , pp. 447-450
    • Kim, W.J.1    Trumpert, D.L.2    Lang, J.H.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.