Study on LD-pumped Nd:YAG laser cutter for silicon wafer

Guangxue Jingmi Gongcheng/Optics and Precision Engineering

Volumn 14, Issue 5, 2006, Pages 829-834

  Cui, Jian Feng ^a,b,c   Zhao, Jing ^e   Fan, Zhong Wei ^a,c,d   Zhao, Cun Hua ^a,b,c   Zhang, Jing ^a,b,c   Niu, Gang ^a,b,c   Shi, Zhao Hui ^a,b,c   Pei, Bo ^c,d   Zhang, Guo Xin ^c   Xue, Yan ^c   Bi, Yong ^d   Qi, Yan ^d  

^a CHANGCHUN INSTITUTE OF OPTICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

^c Beijing GK Laser Technology Co Ltd   (China)

^d CHINESE ACADEMY OF SCIENCES   (China)

^e GENERAL RESEARCH INSTITUTE FOR NONFERROUS METALS   (China)

Author keywords

Acoustooptical Q modulation; All solid state laser; Laser cutter; Laser technology; Silicon chip

Indexed keywords

ACOUSTOOPTICAL EFFECTS; MIRRORS; OPTICAL PUMPING; SEMICONDUCTOR LASERS; SILICON WAFERS; SOLID STATE LASERS;

ACOUSTOOPTICAL Q MODULATION; ALL SOLID STATE LASER; HIGH REFLECTIVITY MIRROR; LASER CUTTER; LASER TECHNOLOGY; SILICON CHIP; THERMAL FOCAL LENGTH; THERMAL LENS EFFECT;

LASER BEAM CUTTING;

EID: 33845534052     PISSN: 1004924X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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