Synthesis of low dielectric constant polyetherimide films

Macromolecular Symposia

Volumn 242, Issue , 2006, Pages 34-39

  Chen, Bor Kuan ^a   Fang, Yu Ting ^a   Cheng, Jing Ru ^a  

^a KUN SHAN UNIVERSITY   (Taiwan)

Author keywords

6FDA; Dielectric properties; Phenylene ether diamines; Polyetherimide; Polyimides

Indexed keywords

AMINES; ETHERS; PERMITTIVITY; POLYIMIDES; PYROLYSIS; TENSILE PROPERTIES;

PHENYLENE ETHER DIAMINES; POLYETHERIMIDE FILMS; WEIGHT LOSS;

POLYETHERIMIDES;

EID: 33845396723     PISSN: 10221360     EISSN: 15213900     Source Type: Journal    
DOI: 10.1002/masy.200651006     Document Type: Conference Paper

References (14)

1. International technology roadmap for semiconductors; 2003 edition, http://public.itrs.net/.
2. J. Belana, J. C. Canadas, J. A. Diego, M. Mudarra, R. Diaz, S. Friederichs, C. Jaimes, M. J. Sanchis, Polym. Int. 1998, 46, 29.
3. M. J. Sanchis, R. Diaz-Calleja, C. Jaimes, J. Belana, J. C. Canadas, J. A. Diego, M. Mudarra, J. Sellares, Polym. Int. 2004, 53, 1368.
4. B. K. Chen, Y. J. Tsai, S. Y. Tsay, Polym. Int. 2006, 55, 93.
5. G. Hougham, G. Tesoro, A. Viehbeck, J. D. Chapple-Sokol, Macromolecules 1994, 27, 5964.
6. K. Goto, T. Akiike, Y. Inoue, M. Matsubara, Macromol. Symp. 2003, 199, 321.
7. A. Gu, S. W. Kuo, F. C. Chang, J. Appl. Polym. Sci. 2001, 79, 1902.
8. B. K. Chen, S. Y. Tsay, T. M. Chiu, J. Appl. Polym. Sci. 2004, 94, 382.
9. Y. Wanatabe, Y. Shibasaki, S. Ando, M. Ueda, Polymer 2005, 46, 5903.
10. S. Tamai, A. Yamaguchi, Polymer 1996, 37, 3683.
11. J. P. Fernández-Blázquez, A. Bello, E. Perez, Macromolecules 2004, 37, 9018.
12. B. K. Chen, S. Y. Tsay, I. C. Shih, Polym. Bull. 54, 39 (2005).
13. J. O. Simpson, A. K. St.Clair, Thin Solid Films 1997, 308-309, 480.
14. C. P. Yang, S. H. Hsiao, C. L. Chung, Polym. Int. 2005, 54, 716.