Scanned-cantilever atomic force microscope with large scanning range

Chinese Optics Letters

Volumn 4, Issue 10, 2006, Pages 580-582

  Yang, Jintao ^a   Xu, Wendong ^a  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL SENSORS; SCANNING;

CLOSED LOOP CONTROL; INTEGRATED CAPACITIVE SENSORS; LASER SPOT TRACKING; SCANNED CANTILEVER ATOMIC FORCE MICROSCOPE (AFM);

ATOMIC FORCE MICROSCOPY;

EID: 33845349857     PISSN: 16717694     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)

1. G. Binnig, C. F. Quate, and Ch. Gerber, Phys. Rev. Lett. 56, 930 (1986).
2. D. R. Baselt and J. D. Baldeschwieler, Rev. Sci. Instrum. 64, 908 (1993).
3. B. G. de Grooth, C. A. Putman, K. O. van der Werf, N. F. van Hulst, G. van Oort, and J. Greve, Proc. SPIE 1639, 205 (1992).
4. P. K. Hansma, B. Drake, D. Grigg, C. B. Prater, F. Yashar, G. Gurley, V. Elings, S. Feinstein, and R. Lai, J. Appl. Phys. 76, 796 (1994).
5. D. Sarid, P. Pax, L. Yi, S. Howells, M. Gallagher, T. Chen, V. Elings, and D. Bocek, Rev. Sci. Instrum. 63, 3905 (1992).
6. G. Meyer and N. M. Amer, Appl. Phys. Lett. 56, 2100 (1990).
7. M. Hipp, H. Bielefeldt, J. Colchero, O. Marti, and J. Mlynek, Ultramicroscopy 42-44, 1498 (1992).
8. C. B. Prater, J. Massie, D. A. Grigg, V. B. Elings, P. K. Hansma, and B. Drake, Scanning stylus atomic force microscope with cantilever tracking and optical access US Patent 5560244 (1996).