Evaluation of the mechanical properties of thin films using nanoindentation

R and D: Research and Development Kobe Steel Engineering Reports

Volumn 52, Issue 2, 2002, Pages 74-77

  Nakaue, Akimitsu ^a   Kawakami, Nobuyuki ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

DATA STORAGE EQUIPMENT; ELASTIC MODULI; INDENTATION; MECHANICAL PROPERTIES; MICROELECTRONICS; NANOSTRUCTURED MATERIALS;

INFORMATION STORAGE MEDIA; MATERIAL PROPERTIES; MICROELECTRONIC DEVICES; NANOINDENTATION;

THIN FILMS;

EID: 33845246558     PISSN: 03738868     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (3)

1. J. Hey: Mechanical Testing by Indentation, Course Notes (1997), Nano Instruments, Inc.
2. W. C. Oliver et al.: J. Mater. Res., Vol.7, No.6 (1992), p.1564.
3. J. T. Wetzel et al.: International Electron Device Meeting Technical Digest (2001), p.73.