A method for measuring frictional forces and shaft vibrations during chemical mechanical polishing

Journal of the Electrochemical Society

Volumn 154, Issue 1, 2007, Pages

  Carter, Phillip W ^a   Werts, Tom ^a  

^a CABOT MICROELECTRONICS CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL MECHANICAL POLISHING; IN SITU PROCESSING; SHAFTS (MACHINE COMPONENTS); SILICA; VIBRATIONS (MECHANICAL);

COEFFICIENT OF FRICTION (COF); FRICTIONAL FORCES; HIGH INTENSITY VIBRATION; SHAFT VIBRATIONS;

FRICTION;

EID: 33845239182     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2386929     Document Type: Article

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