Multiphysics modeling and simulation for a MEMS thermal-mechanical switch

2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings

Volumn 3, Issue , 2006, Pages 582-585

  Weidong, Wang ^a   Popuri, Raj ^a   Onishi, Shinzo ^a   Bumgarner, John ^a   Langebrake, Larry ^a  

^a UNIVERSITY OF SOUTH FLORIDA   (United States)

Author keywords

Actuator; Finite element analysis (FEA); MEMS; Micro switch; Thermal bimorph

Indexed keywords

ACTUATORS; DAMPING; ELECTRIC POTENTIAL; FINITE ELEMENT METHOD; HEAT LOSSES; SWITCHING SYSTEMS; THERMOELECTRICITY;

MEMS; MICRO SWITCH; THERMAL BIMORPH; THERMAL TIME CONSTANT;

MICROELECTROMECHANICAL DEVICES;

EID: 33845224884     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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