Self-assembly of epitaxial monolayers for vacuum wafer bonding

Applied Physics Letters

Volumn 89, Issue 22, 2006, Pages

  Altfeder, Igor ^a   Huang, Biqin ^a   Appelbaum, Ian ^a   Walker, B C ^a  

^a UNIVERSITY OF DELAWARE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONS; EPITAXIAL GROWTH; LIGHT TRANSMISSION; MONOLAYERS; SEMICONDUCTOR MATERIALS; SILICON WAFERS; SILVER; TEMPERATURE; TRANSPARENCY; ULTRATHIN FILMS; VACUUM APPLICATIONS;

ELECTRON CONFINEMENT; INTERFACIAL RESISTANCE; ROOM TEMPERATURE;

SELF ASSEMBLY;

EID: 33751577961     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2399358     Document Type: Article

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