Strain sensitivity enhancement of thin metal film strain gauges on polymer microscale structures

Applied Physics Letters

Volumn 89, Issue 22, 2006, Pages

  Engel, J ^a   Chen, J ^a   Liu, C ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; MATHEMATICAL MODELS; POLYIMIDES; SILICON NITRIDE; STRAIN GAGES; STRAIN MEASUREMENT;

POLYIMIDE BEAMS; POLYMER BEAMS; STRAIN SENSITIVITY; THIN METAL FILMS;

THIN FILMS;

EID: 33751570145     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2397537     Document Type: Article

References (6)

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2. G. R. Witt, Thin Solid Films 22, 133 (1974).
3. G. T. A. Kovacs, Micromachined Transducers Sourcebook, 1st ed. (McGraw-Hill, New York, 1998), 1, 213.
4. J. A. Harley and T. W. Kenny, J. Microelectromech. Syst. 9, 226 (2000).
5. J. M. Engel, J. Chen, Z. Fan, and C. Liu, Sens. Actuators, A 117, 50 (2005).
6. M. T. A. Saif, S. Zhang, A. Haque, and K. J. Hsia, Acta Mater. 50, 2779 (2002).