Nomarski imaging interferometry to measure the displacement field of micro-electro-mechanical systems

Applied Optics

Volumn 45, Issue 30, 2006, Pages 7800-7810

  Amiot, Fabien ^a,b   Roger, Jean Paul ^a  

^a INSTITUT LANGEVIN   (France)

^b CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGING SYSTEMS; INTERFEROMETERS; KINEMATICS; MICROELECTROMECHANICAL DEVICES; THERMAL EFFECTS;

DISPLACEMENT FIELD; INVERSE TRANSFORMATIONS; NOMARSKI IMAGING INTERFEROMETERS; THERMAL ACTUATION;

INTERFEROMETRY;

EID: 33751365084     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.007800     Document Type: Article

References (21)

1. N. V. Lavrik, M. J. Sepaniak, and P. G. Datskos, "Cantilever transducers as a platform for chemical and biological sensors," Rev. Sci. Instrum. 75, 2229-2253 (2004).
2. . T. P. Weihs, S. Hong, J. C. Bravman, and W. D. Nix, "Mechanical deflection of cantilever micro-beams: a new technique for testing the mechanical properties of thin films," J. Mater. Res. 3, 931-942 (1988).
3. D. T. Read and J. W. Dally, "A new method for measuring the strength and ductility of thin films," J. Mater. Res. 8, 1542-1549 (1993).
4. M. A. Haque and M. T. A. Saif, "A review of MEMS-based microscale and nanoscale tensile and bending testing," Exp. Mech. 43, 248-255 (2003).
5. M. Gad-El-Hak, The MEMS Handbook (CRC, 2002).
6. Y. Y. Hung and C. Y. Liang, "Image-shearing camera for direct measurement of surface strains," Appl. Opt. 18, 1046-1051 (1979).
7. P. Aswendt, C.-D. Schmidt, D. Zielke, and S. Schubert, "ESPI solution for noncontacting MEMS-on-wafer testing," Opt. Lasers Eng. 40, 501-515 (2003).
8. M. Françon, "Polarization interference microscopes," Appl. Optics 3, 1033-1036 (1964).
9. G. Nomarski, "Microinterféromètre différentiel à ondes polarisées," J. Phys. Radium 16, 9S-11S (1955).
10. D. L. Lessor, J. S. Hartman, and R. L. Gordon, "Quantitative surface topography determination by Nomarski reflection microscopy. I. Theory," J. Opt. Soc. Am. 69, 357-365 (1979).
11. P. Gleyzes and A. C. Boccara, "Profilométrie picométrique par interférométrie de polarisation. I. L'approche monodétecteur," J. Opt. (Paris) 25, 207-224 (1994).
12. P. Gleyzes, F. Guernet, and A. C. Boccara, "Profilométrie picométrique, II. L'approche multi-détecteur et la détection synchrone multiplexée," J. Opt. (Paris) 26, 251-265 (1995).
13. P. Gleyzes, A. C. Boccara, and H. Saint-Jalmes, "Multichannel Nomarski microscope with polarization modulation: performance and applications," Opt. Lett. 22, 1529-1531 (1997).
14. C. Montarou and T. K. Gaylord, "Analysis and design of modified Wollaston prisms," Appl. Opt. 38, 6604-6616 (1999).
15. A. Dubois, "Phase-map measurements by interferometry with sinuoidal phase modulation and four integrating buckets." J. Opt. Soc. Am. A 18, 1972-1979 (2001).
16. R. Cusack, J. M. Huntley, and H. T. Goldrein, "Improved noise-immune phase-unwrapping algorithm," Appl. Opt. 34, 781-789 (1995).
17. X. Y. He, X. Kang, C. J. Tay, C. Quan, and H. M. Shang, "Proposed algorithm for phase unwrapping," Appl. Opt. 41, 7422-7428 (2002).
18. S. P. Timoshenko and J. N. Goodier, Theory of Elasticity, 3rd ed. (McGraw-Hill, 1970).
19. A. Dubois, J. Selb, L. Vabre, and A. C. Boccara, "Phase measurements with wide-aperture interferometers," Appl. Opt. 39, 2326-2331 (2000).
20. C. R. J. Sheppard and K. G. Larkin, "Effect of numerical aperture on interference fringe spacing," Appl. Opt. 34, 4731-4734 (1995).
21. G. Schulz and K.-E. Elssner, "Errors in phase-measurement interferometry with high numerical apertures," Appl. Opt. 30, 4500-4506 (1991).