Improved temperature stability of LiNbO3 surface acoustic wave devices with sputtered SiO2 over-layers

Ferroelectrics

Volumn 329, Issue , 2005, Pages 57-60

  Gupta, Vinay ^a   Tomar, Monika ^a   Sreenivas, K ^a  

^a UNIVERSITY OF DELHI   (India)

Author keywords

Magnetron sputtering; Material parameters; SiO2 thin films

Indexed keywords

ACOUSTIC WAVES; ELASTIC MODULI; LITHIUM COMPOUNDS; MAGNETRON SPUTTERING; PERMITTIVITY; SURFACE WAVES; WAVE PROPAGATION;

DEPOSITION CONDITIONS; MATERIAL PARAMETERS; TEMPERATURE COEFFICIENT OF DELAY (TCD); TEMPERATURE COEFFICIENTS;

SILICA;

EID: 33751300309     PISSN: 00150193     EISSN: 15635112     Source Type: Conference Proceeding    
DOI: 10.1080/00150190500315343     Document Type: Article

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