Fabrication and properties of silicon-based PLZT thin films for MFSFET applications

Integrated Ferroelectrics

Volumn 61, Issue , 2004, Pages 189-195

  Shao, Tian Qi ^a   Ren, Tian Ling ^a   Liu, Li Tian ^a   Zhu, Jun ^a   Li, Zhi Jian ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

FET; Metal ferroelectric semiconductor (MFS) structures; PLZT; PT; Sol gel

Indexed keywords

CAPACITORS; FIELD EFFECT TRANSISTORS; RAPID THERMAL ANNEALING; SILICON WAFERS; SOL-GELS;

METAL-FERROELECTRIC-SEMICONDUCTOR (MFS) STRUCTURES; PLZT; POLARIZATION VOLTAGES; SEEDING LAYERS;

THIN FILMS;

EID: 33751190979     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580490459233     Document Type: Article

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