Hafnium nitrate precursor synthesis and HfO 2 thin film deposition

Integrated Ferroelectrics

Volumn 48, Issue , 2002, Pages 3-12

  Weiwei, Zhuang ^a   Conley, John F ^a   Ono, Yoshi ^a   Evans, David R ^a   Solanki, R ^b  

^a SHARP LABORATORIES OF AMERICA   (United States)

^b OREGON HEALTH AND SCIENCE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33751183552     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580215449     Document Type: Article

References (1)

1. B.R. Field and C.J. Hardy, Proc. Chem. Soc. 76-77 (1962)