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Volumn 52, Issue , 2003, Pages 205-213
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PZT thin films with decreasing thickness crystallized at 400°C
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Author keywords
Chemical solution deposition (CSD); Low temperature crystallization; PZT thin films; Ultra thin films
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Indexed keywords
CRYSTALLIZATION;
DEPOSITION;
FERROELECTRICITY;
LEAD COMPOUNDS;
SOLUTIONS;
CHEMICAL SOLUTION DEPOSITION (CSD);
FERROELECTRIC RESPONSE;
LOW-TEMPERATURE CRYSTALLIZATION;
PZT THIN FILMS;
ULTRATHIN FILMS;
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EID: 33751180575
PISSN: 10584587
EISSN: 16078489
Source Type: Conference Proceeding
DOI: 10.1080/10584580390254952 Document Type: Article |
Times cited : (8)
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References (6)
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