Deposited indium-tin-oxide (ITO) transparent conductive films by reactive low-voltage ion plating (RLVIP) technique

Journal of Luminescence

Volumn 122-123, Issue 1-2, 2007, Pages 908-910

  Xu, Ying ^a,b   Gao, Jinsong ^a   Zheng, Xuanming ^a   Wang, Xiaoyi ^a   Wang, Tongtong ^a,b   Chen, Hong ^a  

^a CHANGCHUN INSTITUTE OF OPTICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

Infrared reflectance; ITO film; Optical transmittance; RLVIP; Sheet resistance

Indexed keywords

CARBON DIOXIDE; CONDUCTIVE FILMS; DEPOSITION; LIGHT TRANSMISSION; OXIDATION; REACTIVE ION ETCHING;

INDIUM TIN OXIDE (ITO); INFRARED REFLECTANCE; ION PLATING; REACTIVE LOW VOLTAGE ION PLATING (RLVIP); SHEET RESISTANCE;

SEMICONDUCTING INDIUM COMPOUNDS;

EID: 33750932748     PISSN: 00222313     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jlumin.2006.01.323     Document Type: Article

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