A novel ultra-miniature catheter tip pressure sensor fabricated using silicon and glass thinning techniques

Materials Research Society Symposium Proceedings

Volumn 681, Issue , 2001, Pages 146-151

  Allen, Henry ^a   Ramzan, Kamrul ^a   Knutti, Jim ^a   Withers, Stan ^b  

^a Silicon Microstructures Incorporated   (United States)

^b Jomed Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BLOOD PRESSURE; CATHETER TIP SENSORS; DIAPHRAGMS; GLASS; SILICON; SILICON WAFERS;

ANODIC BONDING; DIAPHRAGM WINDOWS; PIEZORESISTIVE NETWORKS;

PRESSURE SENSORS;

EID: 33750919792     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-681-i7.4     Document Type: Conference Paper

References (0)