Characteristics of carbon thin film formed on PET by plasma based ion implantation

Shinku/Journal of the Vacuum Society of Japan

Volumn 47, Issue 3, 2004, Pages 220-223

  Suehiro, Masaomi ^a   Watanabe, Satoshi ^a   Tanaka, Takeshi ^a   Takagi, Toshinori ^a  

^a HIROSHIMA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CHEMICAL BONDS; ION IMPLANTATION; PLASMAS; PLASTIC FILMS; RAMAN SPECTROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

AMORPHOUS CARBON FILMS; LASER RAMAN SPECTROMETRY; PLASMA BASED ION IMPLANTATION (PBII); POLYETHYLENE TEREPHTHALATE (PET) FILMS;

THIN FILMS;

EID: 33750839244     PISSN: 05598516     EISSN: None     Source Type: Journal    
DOI: 10.3131/jvsj.47.220     Document Type: Article

References (3)

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2. T. Tanaka, M. Yoshida, M. Shinohara and T. Takagi: J. Vac. Sci. Technol. A20 (2002) 625.
3. M. Yoshida, T. Tanaka, M. Shinohara, S. Watanabe, J. W. Lee and T. Takagi: J. Vac. Sci. Technol. A20 (2002) 1802.