Temperature dependent metal-induced lateral crystallization of amorphous SiGe on insulating substrate

Applied Physics Letters

Volumn 89, Issue 18, 2006, Pages

  Kanno, Hiroshi ^a   Toko, Kaoru ^a   Sadoh, Taizoh ^a   Miyao, Masanobu ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ANNEALING; HIGH TEMPERATURE EFFECTS; NUCLEATION; SEMICONDUCTING SILICON COMPOUNDS; THERMAL EFFECTS;

HIGH TEMPERATURE ANNEALING; INSULATING SUBSTRATES; METAL-INDUCED LATERAL CRYSTALLIZATION (MILC); SPONTANEOUS NUCLEATION;

CRYSTALLIZATION;

EID: 33750712063     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2374849     Document Type: Article

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