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Volumn 6311, Issue , 2006, Pages
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Multi-wavelength digital holographic metrology
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Coherix Inc
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(United States)
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Author keywords
3D shapes; Flatness; Holography; Interferometry; Metrology
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Indexed keywords
3D SHAPES;
DIGITAL HOLOGRAMS;
FLATNESS;
TUNABLE LASERS;
HOLOGRAMS;
MEASUREMENTS;
OPTICAL COLLIMATORS;
OPTICAL FIBERS;
PATTERN RECOGNITION;
PHASE SHIFTERS;
SURFACE MEASUREMENT;
HOLOGRAPHIC INTERFEROMETRY;
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EID: 33750700485
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.686727 Document Type: Conference Paper |
Times cited : (29)
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References (10)
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