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Volumn 91, Issue 2-3, 2007, Pages 195-200
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Effects of hydrogen plasma on passivation and generation of defects in multicrystalline silicon
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Author keywords
Electrochemical impedance spectroscopy; Hydrogen; Minority carrier diffusion length; Multicrystalline silicon; SIMS
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Indexed keywords
DEUTERIUM;
ELECTRIC CONDUCTIVITY;
GRAIN BOUNDARIES;
PASSIVATION;
PLASMAS;
SECONDARY ION MASS SPECTROMETRY;
SPECTROSCOPY;
ELECTRON BEAM INDUCED CURRENT (EBIC);
MINORITY CARRIER DIFFUSION LENGTH;
MULTICRYSTALLINE SILICON;
SILICON;
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EID: 33750698999
PISSN: 09270248
EISSN: None
Source Type: Journal
DOI: 10.1016/j.solmat.2006.08.008 Document Type: Article |
Times cited : (13)
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References (18)
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