Ar rf plasma treatment of PET films for Si films adhesion improvement

Journal of Optoelectronics and Advanced Materials

Volumn 8, Issue 5, 2006, Pages 1935-1938

  Rusu, I A ^a   Popa, G ^a   Saied, S O ^b   Sullivan, J L ^b  

^a ALEXANDRU IOAN CUZA UNIVERSITY OF IASI   (Romania)

^b ASTON UNIVERSITY   (United Kingdom)

Author keywords

Adhesion; PET films; RF plasma; Si films

Indexed keywords

ADHESION; CONTACT ANGLE; ELECTRIC DISCHARGES; LOAD TESTING; MAGNETRONS; PLASMA APPLICATIONS; PLASMA THEORY; SILICON ON INSULATOR TECHNOLOGY; WAVE PLASMA INTERACTIONS;

ADHESION IMPROVEMENT; CONTACT ANGLE METHOD; PET FILMS; QUANTITATIVE INFORMATION; RF PLASMA; RF PLASMA TREATMENTS; SI FILMS; THIN SILICON FILMS;

POLYMER FILMS;

EID: 33750598920     PISSN: 14544164     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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