Mechanically tri-stable, true single-pole-double-throw (SPDT) switches

Journal of Micromechanics and Microengineering

Volumn 16, Issue 11, 2006, Pages 2251-2258

  Oberhammer, J ^a   Tang, M ^b,c   Liu, A Q ^b   Stemme, G ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; MICROACTUATORS; PHOTOLITHOGRAPHY; SILICON WAFERS; TERMINALS (ELECTRIC);

ACTUATION ENERGY; INPUT SIGNALS; OUTPUT PORTS; SINGLE POLE DOUBLE THROW (SPDT) SWITCHES;

ELECTRIC SWITCHES;

EID: 33750591275     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/11/001     Document Type: Article

References (35)

1. Larson L E, Hackett R H and Lohr R F 1991 Microactuators for GaAs-based microwave integrated circuits Proc. Transducers 1991 (San Francisco, USA, 24-27 June) pp 743-6
2. Rebeiz G M and Muldavin J B 2001 RF MEMS switches and switch circuits IEEE Microwave Mag. 2 59-71
3. Rebeiz G M 2003 RF MEMS Theory, Design and Technology 1st edn (Hoboken, NJ: Wiley)
4. Yao J 2000 RF MEMS from a device perspective J. Micromech. Microeng. 10 R9-R38
5. Tilmans H A C 2002 MEMS components for wireless communications (invited paper) Proc. 16th Eurosensors (Prague, Czech Republic, 15-18 Sept.) pp 1-34
6. Kim M, Hacker J B, Mihailovich R E and DeNatale J F 2001 A DC-to-40 GHz four-bit RF-MEMS true-time delay network IEEE Microw. Wireless Compon. Lett. 11 56-8
7. Rebeiz G M, Tan G-L and Hayden J S 2002 RF MEMS phase shifters: design and applications IEEE Microw. Mag. 3 72-81
8. Malczewski A and Pillans B 2004 Single-pole double-throw switches using capacitive MEMS switches Int. J. RF Microw. Comput.-Aided Eng. 14 383-7
9. Tang M, Liu A Q, Agarwal A, Liu Z and Lu C 2005 A single-pole double-throw (SPDT) circuit using lateral metal-contact micromachined switches Sensors Actuators A 121 187-96
10. Simon W, Schauwecker B, Lauer A, Wien A and Wolff I 2004 EM design of broadband RF multiport toggle switches Int. J. RF Microw. Comput.-Aided Eng. 14 329-37
11. Moseley R, Yeatman E, Holmes A, Syms R, Finlay A and Boniface P 2006 Laterally actuated, low voltage, 3-port RF MEMS switch Proc. IEEE Micro Electro Mechanical Systems 2006 (Istanbul, Turkey, 22-26 Jan.) pp 878-81
12. Tan G-L, Mihailovich R, Hacker J, DeNatale J and Rebeiz G 2003 Low-loss 2- and 4-bit TTD MEMS phase shifters based on SP4T switches IEEE Trans. Microw. Theory Tech. 51 297-304
13. Oberhammer J and Stemme G 2006 Active opening force and passive contact force electrostatic switches for soft metal contact materials IEEE J. Microelectromech. Syst. at press
14. Qiu J, Lang J, Slocum A and Weber A 2005 A bulk-micromachined bistable relay with U-shaped thermal actuators IEEE J. Microelectromech. Syst. 14 1099-109
15. Gomm T, Howell L L and Selfridge R H 2002 In-plane linear displacement bistable microrelay J. Micromech. Microeng. 12 257-64
16. Receveur R, Marxer C, Woering R, Larik V and de Rooij N-F 2005 Laterally moving bistable MEMS DC switch for biomedical applications IEEE J. Microelectromech. Syst. 14 1089-98
17. Brenner M, Lang J, Li J, Qiu A and Slocum A 2003 Optimal design of a bistable switch Proc. Natl Acad. Sci. USA 100 9663-7
18. Geear M, Yeatman E, Holmes A, Syms R and Finlay A 2004 Microengineered electrically resettable circuit breaker IEEE J. Microelectromech. Syst. 13 887-94
19. Guo H and Zhang H 2004 A novel electro-thermal actuated micro position lock Proc. IEEE Solid-State and Integrated Circuits Tech. (18-21 Oct.) pp 1915-18
20. Sun X-Q, Farmer K R and Carr W N 1998 A bistable microrelay based on two-segment multimorph cantilever actuators Proc. IEEE Micro Electro Mechanical Systems 1998 (Heidelberg, Germany, 25-29 Jan.) pp 154-59
21. Ruan M, Shen J and Wheeler C 2001 Latching micromagnetic relays IEEE J. Microelectromech. Syst. 10 511-7
22. Gray G and Kohl P 2005 Magnetically bistable actuator: part I. Ultra-low switching energy and modelling Sensors Actuators A 119 489-501
23. Legtenberg R, Gilbert J, Senturia S and Elwenspoek M 1997 Electrostatic curved electrode actuators IEEE J. Microelectromech. Syst. 6 257-65
24. Cabuz C C, Cabuz E I, Ohnstein T R, Neus J and Maboudian R 2000 Factors enhancing the reliability of touch-mode electrostatic actuators Sensors Actuators A 79 245-50
25. Thielicke E and Obermeier E 2000 Microactuators and their technologies Mechatronics 10 431-55
26. Oberhammer J and Stemme G 2004 Lov-voltage high-isolation DC-to-RF MEMS switch based on an S-shaped film actuator IEEE Trans. Electron Devices 51 149-55
27. Li J, Brenner M, Christen T, Kotilainen M, Lang J and Slocum A 2005 Deep-reactive ion-etched compliant starting zone electrostatic zipping actuators IEEE J. Microelectromech. Syst. 14 1283-97
28. Schiele I and Hillerich B 1999 Comparison of lateral and vertical switches for application as microrelays J. Micromech. Microeng. 9 146-50
29. Coutu R, Kladitis P, Leedy K and Crane R 2004 Selecting metal alloy electric contact materials for MEMS switches J. Micromech. Microeng. 14 1157-64
30. Mercado L L, Koo S-M, Lee T-Y T and Liu L 2003 A mechanical approach to overcome RF MEMS switch stiction problem Proc. IEEE Electronic Components and Technology Conf. 2003 (New Orleans, LA, 27-30 May) pp 377-84
31. Hyman D and Mehregany M 1999 Contact physics of gold microcontacts for MEMS switches IEEE Trans. Compon. Packag. Technol. 22 357-64
32. Schlaak H F 2002 Potentials and limits of micro-electromechanical systems for relays and switches Proc. Int. Conf. on Electrical Contacts (Zurich, Switzerland, 9-12 Sept.) pp 19-30
33. Schimkat J 1998 Contact materials for microrelays Proc. IEEE Micro Electro Mechanical Systems 1998 (Heidelberg, Germany, 25-29 Jan.) pp 190-4
34. Oberhammer J, Liu A Q and Stemme G 2005 Numerical algorithm for quasi-static nonlinear simulation of touch-mode actuators with complex geometries and pre-stressed materials Proc. IEEE Transducers 2005 (Seoul, Korea, 5-9 June) pp 2119-22
35. Zubel I 2000 Silicon anisotropic etching in alkaline solutions III: on the possibility of spatial structures forming in the course of Si(100) anisotropic etching in KOH and KOH+IPA solutions Sensors Actuators A 84 116-25