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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6286, Issue , 2006, Pages

Deposition of multilayer optical coatings using closed field magnetron sputtering

(5) Gibson, D R a Brinkley, I a Hall, G W a Waddell, E M a Walls, J M a

a Applied Multilayers Ltd (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; DEPOSITION; DIELECTRIC MATERIALS; ELECTRIC FIELDS; ELECTRIC POTENTIAL; INDIUM COMPOUNDS; INFRARED DETECTORS; OPTICAL COATINGS; OXIDE SUPERCONDUCTORS; THIN FILMS;

CLOSED FIELD MAGNETRON SPUTTERING (CFM); GRADED INDEX LAYERS; ROTATING SUBSTRATES DRUM CARRIERS; THERMAL CONTROL FILTERS;

MAGNETRON SPUTTERING;

EID: 33750489431 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.679052 Document Type: Conference Paper

Times cited : (5)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.