Research on computer controlled polishing technology of φ124 mm aspheric reaction-burned silicon carbide mirror

Guangxue Jingmi Gongcheng/Optics and Precision Engineering

Volumn 14, Issue 4, 2006, Pages 539-544

  Niu, Hai Yan ^a,b   Zhang, Xue Jun ^a  

^a CHANGCHUN INSTITUTE OF OPTICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

Aspheric surface polishing; Digital controlling technology; RB SiC; Surface figure

Indexed keywords

NUMERICAL CONTROL SYSTEMS; POLISHING; SILICON CARBIDE; SURFACE MEASUREMENT;

ASPHERIC SURFACE POLISHING; DIGITAL CONTROLLING TECHNOLOGY; REACTION BURNED SILICON CARBIDE; SURFACE FIGURE;

MIRRORS;

EID: 33750417198     PISSN: 1004924X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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