Improved CMOS performance via enhanced carrier mobility

Materials Science and Engineering: B

Volumn 134, Issue 2-3 SPEC. ISS., 2006, Pages 133-137

  Mooney, P M ^a  

^a SIMON FRASER UNIVERSITY   (Canada)

Author keywords

CMOS; Defects; Lattice mismatched structures; SiGe; Strain relaxation; Strained Si

Indexed keywords

CARRIER MOBILITY; CRYSTAL DEFECTS; HOLE MOBILITY; SILICON; TRANSISTORS;

LATTICE MISMATCHED STRUCTURES; STRAIN RELAXATION; STRAINED SILICON;

CMOS INTEGRATED CIRCUITS;

EID: 33750351803     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2006.06.048     Document Type: Article

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