Carbon clustering and diamond nucleation in fluorocarbon plasmas

AIP Conference Proceedings

Volumn 799, Issue , 2005, Pages 189-192

  Takahashi, Kazuo ^a   Ono, Kouichi ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33750297743     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.2134597     Document Type: Conference Paper

References (8)

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2. Takahashi, K., Ono, K., Setsuhara, Y., Okano, T., and Kouzaki, T., Abstracts of 16th International Symposium on Plasma Chemistry, pp. 559 (2003).
3. Takahashi, K., and Tachibana, K., J. Vac. Sci. Technol. A 19, 2055 (2001).
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7. Mott-Smith, H., M., and Langmuir, I., Phys. Rev. 28, 727 (1926).
8. Badziag, P., Verwoerd, W., S., Ellis, W., P., and Greiner, N., R., Nature 343, 244 (1990).