Sub 400 nm spatial resolution extreme ultraviolet holography with a table top laser

Optics Express

Volumn 14, Issue 21, 2006, Pages 9636-9642

  Wachulak, P W ^a   Bartels, R A ^a   Marconi, M C ^a   Menoni, C S ^a   Rocca, J J ^a   Lu, Y ^a   Parkinson, B ^a  

^a Department of Environmental and Radiological Health Sciences   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CORRELATION METHODS; LASERS; OPTICAL RESOLVING POWER; PHOTORESISTS; WAVELET TRANSFORMS;

FRESNEL PROPAGATOR; GABOR HOLOGRAPHY; IMAGE CORRELATION;

HOLOGRAPHY;

EID: 33750292878     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.14.009636     Document Type: Article

References (22)

1. D. Gabor, “A new microscopic principle,” Nature 161, 777 (1948).
2. E. N. Leith and J. Upatnieks, “Reconstructed wavefronts and communication theory,” J. Opt. Soc. Am. 52, 1123 (1962).
3. A. V. Baez. “A study in diffraction microscopy with special reference to X-rays,” J. Opt. Soc. Am. 42, 756 (1952).
4. J. W. Giles. “Image reconstruction from a Fraunhofer X-ray hologram with visible light,” J. Opt. Soc. Am. 59, 1179 (1969).
5. S. Aoki and S. Kikuta, “X ray holographic microscopy,” Jpn. J. Appl. Phys. 13, 1385 (1974).
6. J. E. Trebes, S. B. Brown, E. M. Campbell, D. L. Matthews, D. G. Nilson, G. F. Stone, and D. A. Whelan, “Demonstration of X-Ray holography with an X-Ray laser,” Science 238, 517 (1987).
7. S. Lindaas, M. Howells, C. Jacobsen and A. Kalinovsky, “X-ray holographic microscopy by means of photoresist recording and atomic force microscope readout,” J. Opt. Soc. Am. A 13, 1788 (1996).
8. I. McNulty, J. Kirz, C. Jacobsen, E. Anderson, M. R. Howells, and D. P. Kern, “High resolution imaging by Fourier Transform X-ray holography,” Science 256, 1009 (1992).
9. S. Elsebitt, W. F. Schlotter, M. Lorgen, O. Hellwig, W. Eberhardt, J. Stohr, “Lensless imaging of magnetic nanostructures by x-ray spectro holography,” Nature 432, 885 (2004).
10. C. D. Macchietto, B. R. Benware and J. J. Rocca, “Generation of millijoule-level soft-X ray laser pulses at a 4-Hz repetition rate in a highly saturated tabletop capillary discharge amplifier,” Opt. Lett. 24, 1115 (1999).
11. B. M. Luther, Y. Wang, M. A. Larotonda, D. Alessi, M. Berril, J. J. Rocca, J. Dunn, R. Keenan, V. Shlyaptsev, “High repetition rate collisional soft X-ray lasers based on grazing incidence pumping,” IEEE J. Quantum Electron 42, 4 (2006).
12. R. A. Bartels, P. A. Green, H. Kapteyn, M. Murnane, S. Backus, I. P. Christov, D. Attwood, and C. Jacobsen. “Generation of spatially coherent light at extreme ultraviolet wavelengths,” Science 297, 376 (2002).
13. G. L. Rogers. “Gabor diffraction microscopy. The hologram as a generalized zone-plate,” Nature 166, 236 (1950).
14. D. Attwood, Soft X-ray and extreme ultraviolet radiation, (Cambridge University Press. 1999).
15. Y. Liu, M. Seminario, F. G. Tomasel, C. Chang, J. J. Rocca, and D. T. Attwood, “Achievement of essentially full spatial coherence in a high-average-power soft-x-ray laser,” Phys. Rev. A, 6303(3) art. no.-033802.
16. M. C. Marconi, J. L. A. Chilla, C. H. Moreno, B. R. Benware and J. J. Rocca, “Measurement of the spatial coherence buildup in a discharge pumped table-top soft x-ray laser,” Phys. Rev. Lett. 79, 2799 (1997).
17. B. R. Benware, C. H. Moreno, D. J. Burd, and J. J. Rocca, “Operation and output pulse characteristics of an extremely compact capillary-discharge tabletop soft-x-ray laser,” Opt. Lett. 22, 796 (1997).
18. AFM cantilever from MicroMasch with the following physical characteristics: cantilever length 230 pm, width 40 pm, thickness t = 7 pm, full tip cone angle 30°, tip height h = 20 - 25 pm, typical tip curvature radius of uncoated probe < 10 nm.
19. T. Beetz and C. Jacobsen, “Soft X-ray radiation damage studies in PMMA using a cryo-STXM,” J Synchrotron Radiat. 10, 280 (2002).
20. X. Zhang, C. Jacobsen, S. Lindaas, and S. Williams, “Exposure strategies for PMMA in situ x-ray absorption near edge structure spectroscopy,” J. Vac. Sci. Technol. B 13, 1477 (1995).
21. J. W. Goodman, Introduction to Fourier Optics, (Roberts and Company Publishers, 2005).
22. J. Nunez, X. Otazu, and M. T. Merino, “A multiresolution-based method for the determination of the relative resolution between images: First application to remote sensing and medical images,” Int. J. Imaging Syst. Technol. 15, 225 (2005).