Dissociative adsorption of methyl chloride on Si(001) studied by scanning tunneling microscopy

Journal of Electron Microscopy

Volumn 54, Issue SUPPL. 1, 2005, Pages

  Woelke, Axel ^a   Imanaka, Soichi ^a   Watanabe, Shinichi ^a   Goto, Seishiro ^a   Hashinokuchi, Michihiro ^a   Okada, Michio ^a   Kasai, Toshio ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Dissociative adsorption; Methyl chloride; Molecular beam; Si(001); STM

Indexed keywords

ADSORPTION; CHLORINE COMPOUNDS; DISSOCIATION; MOLECULAR BEAMS; SILICON;

CL ATOMS; CONDITION; DISSOCIATIVE ADSORPTION; METHYL CHLORIDES; MICROSCOPY IMAGES;

SCANNING TUNNELING MICROSCOPY;

EID: 33750201136     PISSN: 00220744     EISSN: 14779986     Source Type: Journal    
DOI: 10.1093/jmicro/54.suppl_1.i21     Document Type: Conference Paper

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