E-beam photoresist and carbon nanotubes as biomimetic dry adhesives

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 926-929

  Tsai, Y C ^a   Shih, W P ^a   Wang, Y M ^b   Huang, L S ^b   Shih, P J ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ADHESIVES; CARBON NANOTUBES; CHEMICAL VAPOR DEPOSITION; ELECTRIC CONTACTS; ELECTRON BEAM LITHOGRAPHY;

ADHESION FORCES; ARTIFICIAL FIBRILS; BIOMIMETIC ADHESIVES; WATER-VAPOR ASSISTED DEPOSITION;

PHOTORESISTS;

EID: 33750138893     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

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