Optimization of doping concentration for three-dimensional bulk silicon microrefrigerators

Annual IEEE Semiconductor Thermal Measurement and Management Symposium

Volumn 2006, Issue , 2006, Pages 232-236

  Zhang, Yan ^a   Zeng, Gehong ^a   Shakouri, Ali ^a   Wang, Peng ^b   Yang, Bao ^b   Bar Cohen, Avram ^b  

^a University of California Santa Cruz   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

Author keywords

Doping concentration; Electrical conductivity; Hot spots; On chip thermal management; Seebeck coefficient; Silicon microrefrigerators

Indexed keywords

DOPING CONCENTRATION; ON-CHIP THERMAL MANAGEMENT; SEEBECK COEFFICIENT; SILICON MICROREFRIGERATORS;

HEATING; OPTIMIZATION; REFRIGERATORS; SEEBECK EFFECT; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; THERMAL CONDUCTIVITY;

MICROELECTRONICS;

EID: 33750129279     PISSN: 10652221     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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