Optical temperature control of multiple microheaters using digital micromirror device

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 390-393

  Ichikawa, A ^a   Arai, F ^b   Fukuda, T ^a  

^a NAGOYA UNIVERSITY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIGITAL MICROMIRROR DEVICE; MICROHEATERS; MICROSCOPIC MIRRORS; OPTICAL TEMPERATURE CONTROL;

HYDROGELS; MIRRORS; OPTICAL SYSTEMS; THERMODYNAMIC PROPERTIES;

MICROELECTROMECHANICAL DEVICES;

EID: 33750108646     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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