Reactive magnetron sputtering of thin film solar cells;Reaktives magnetronsputtern von dünnschichtsolarzellen

Vakuum in Forschung und Praxis

Volumn 18, Issue 5, 2006, Pages 6-10

  Ellmer, Klaus ^a   Unold, Thomas ^b  

^a HAHN MEITNER INSTITUT   (Germany)

^b Institut im Bereich Solarenergie

Author keywords

[No Author keywords available]

Indexed keywords

CONVERSION EFFICIENCES; METALLIC TARGETS; SULFURIZATION PROCESS; THIN FILM SOLAR CELLS;

DEPOSITION; ELECTRONIC PROPERTIES; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; THIN FILMS;

SOLAR CELLS;

EID: 33750074175     PISSN: 0947076X     EISSN: None     Source Type: Journal    
DOI: 10.1002/vipr.200600298     Document Type: Article

References (10)

1. R. A. Powell and S. M. Rossnagel, Thin Films. PVD for Microelectronics: "Sputter Deposition Applied to Semiconductor Manufacturing" (Academic Press, San Diego, 1999).
2. z.B. S. Runkel, O. Hohn, J. Degenhardt, B. Roos, "Inline- Beschichtung von optischen Substraten", Vakuum in Forschung und Praxis 17 (2005) p. 251
3. 2 J. A. Thornton, T. C. Lommasson, H. Talieh and B.-H. Tseng. Solar Cells 24, 1 (1988).
4. K. Ellmer, J. Hinze, and J. Klaer, "Copper indium disulfide solar cell absorbers prepared in a one-step process by reactive magnetron sputtering from copper and indium targets" Thin Solid Films 413, 92 (2002).
5. 2 thin films on sapphire by radio frequency reactive sputtering", Appl. Phys. Lett. 83, 1743 (2003)
6. 2 solar cells from a rapid thermal process (RTP)", Solar Energy Mat. Solar Cells 67, 159 (2001).
7. A. Gupta and A. D. Compaan, "All-sputtered 14% CdS/CdTe thin-film solar cell with ZnO:Al transparent conducting oxide" Appl.Phys. Lett. 85, 684 (2004).
8. 2 Solar Cells by Reactive Magnetron Sputtering", Appl. Phys. Lett. 88, 213502 (2006).
9. J. Klaer, I. Luck, A. Boden, R. Klenk, I. Gavilanes and R. Scheer, "Mini-modules from a CuInS baseline process", Thin Solid Films 431-432, 534 (2003).
10. 2 Solar Cells", Prog. Photovolt: Res. Appl. 2005; 13:209.